1. probe and oscillator arrangement, 4. capillary tube, 5. measurement object, 6. gas pressure control, 12. probe tip, 88, 89. - piezoelectric control elements to move tip in three dimensions x, y, z
(patent application DE 19700747A1)
1. probe and oscillator arrangement, 4. capillary tube, 5. measurement object, 6. gas pressure control, 12. probe tip, 88, 89. - piezoelectric control elements to move tip in three dimensions x, y, z
(patent application DE 19700747A1)